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Turbo molecular pump working principle- vacuum pump Schematic view of the apparatus:1 1000 l/s turbomolecular pump, 2 ion Turbo molecular pumps

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Turbomolecular Pump｜Fundamentals of Vacuum Pumps (High Vacuum)｜How to

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Schematic view of the apparatus:1 1000 l/s turbomolecular pump, 2 ion